Preparation process of nickel-vanadium alloy sputtering target
Material Preparation - Vacuum Induction Melting - Chemical Analysis - Forging - Rolling - Annealing - Metallographic Inspection - Machining - Dimensional Inspection - Cleaning - Final Inspection - Packaging
In the fabrication of integrated circuits, pure gold is generally used as interconnect metal, deposited on a silicon wafer, but gold will diffuse into the silicon wafer to form a high-resistance AuSi compound, which will greatly reduce the current density in the wiring, resulting in the failure of entire wiring system.
So, It is proposed to add adhesive layer between the gold thin film and silicon wafers. The adhesive layer is usually made of pure nickel, but diffusion also occurs between the nickel layer and the gold conductive layer, so that a barrier layer is needed to prevent diffusion between the gold conductive layer and nickel adhesive layer.
With a high melting point and a large current density, vanadium is chosen to deposit barrier layer, therefore, nickel sputtering target, vanadium sputtering target, gold sputtering target are all used in the fabrication of integrated circuits.
Nickel vanadium NiV sputtering targets containing 7% vanadium has both advantages of nickel and vanadium, thus adhesive layer and barrier layer can be achieved at a time. NiV alloy is non-magnetic materials, which is conducive to magnetron sputtering. In the electronics information industry, it is gradually replacing pure nickel sputtering targets.
The picture below are two micrographs of our NiV(93/7 wt%) alloy sputtering target, the average grain size<100μm.
Available for COA( Certificate of Analysis)
Changsha Xinkang Advanced Materials Co., Ltd (XK) is an international company involved in the R & D, manufacturing, and sales of many types of high-tech materials. We provide high-purity materials, customized alloys, compounds, and almost every kind of complicated synthetic materials to research institutes and high-tech enterprises worldwide. We have significant advantages in high-purity metals, high-purity compounds, rare-earth metals, powder materirals, coated substrates, along with many other materials.
ASTM/B ASME SB, AMS, DIN, JIS and other requirements fromcustomers. And these products have
been widely used in the petrochemical industry, aerospace and aviation, shipbuilding, energy, medical,
military, electronics, environmental protection, machinery and instruments, metallurgy, automotive and
other fields.
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been certificated with IS09001:2015 quality management system and IS014001:2015 environmental
management system. At present, the company is well equipped with Hi-tech equipment and a huge
contingent of technicians. To ensure the excellent quality, we test the products with carbon sulfur
instrument, spectrometer, flaw detector, cupping machine, stiffness tester and so on. Professional
technician, skilled workers and advanced equipment enable us to present products and services with
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highly appreciated by our customers.
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Standard export packaging: Vacuum sealed package inside; export carton or wooden case outside
Shipment can be made by Fedex, DHL, UPS, *** express etc.
For shipments up to 100KG in gross weight, we ensure quick and efficient handling. For orders exceeding 100KG, we will collaborate closely to determine the optimal shipping method tailored to your needs.
1. Are you a trading company or a manufacturer?
Xinkang: We are a distinguished manufacturer with over a decade of expertise in this specialized field.
2. How long is your delivery time?
Xinkang: For regular sizes or samples, shipment can be arranged within 3-5 days. For bulk orders, the delivery timeframe extends to 15 days.
3. Do you have a Minimum Order Quantity (MOQ)?
Xinkang: No, we do not have a MOQ and gladly support sample requests.
4. What payment methods do you accept?
Xinkang: We accept T/T in advance, PayPal, Western Union, and other convenient options.
We warmly invite you to contact us anytime! Your inquiries are always welcome.
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