Preparation process of nickel-vanadium alloy sputtering target
Material Preparation - Vacuum Induction Melting - Chemical Analysis - Forging - Rolling - Annealing - Metallographic Inspection - Machining - Dimensional Inspection - Cleaning - Final Inspection - Packaging
In the fabrication of integrated circuits, pure gold is generally used as interconnect metal, deposited on a silicon wafer, but gold will diffuse into the silicon wafer to form a high-resistance AuSi compound, which will greatly reduce the current density in the wiring, resulting in the failure of entire wiring system.
So, It is proposed to add adhesive layer between the gold thin film and silicon wafers. The adhesive layer is usually made of pure nickel, but diffusion also occurs between the nickel layer and the gold conductive layer, so that a barrier layer is needed to prevent diffusion between the gold conductive layer and nickel adhesive layer.
With a high melting point and a large current density, vanadium is chosen to deposit barrier layer, therefore, nickel sputtering target, vanadium sputtering target, gold sputtering target are all used in the fabrication of integrated circuits.
Nickel vanadium NiV sputtering targets containing 7% vanadium has both advantages of nickel and vanadium, thus adhesive layer and barrier layer can be achieved at a time. NiV alloy is non-magnetic materials, which is conducive to magnetron sputtering. In the electronics information industry, it is gradually replacing pure nickel sputtering targets.
The picture below are two micrographs of our NiV(93/7 wt%) alloy sputtering target, the average grain size<100μm.
Available for COA( Certificate of Analysis)
Changsha Xinkang Advanced Materials Co., Ltd (XK) is an international company involved in the R & D, manufacturing, and sales of many types of high-tech materials. We provide high-purity materials, customized alloys, compounds, and almost every kind of complicated synthetic materials to research institutes and high-tech enterprises worldwide. We have significant advantages in high-purity metals, high-purity compounds, rare-earth metals, powder materirals, coated substrates, along with many other materials.
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management system. At present, the company is well equipped with Hi-tech equipment and a huge
contingent of technicians. To ensure the excellent quality, we test the products with carbon sulfur
instrument, spectrometer, flaw detector, cupping machine, stiffness tester and so on. Professional
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Standard export packaging: Vacuum sealed package inside; export carton or wooden case outside
Shipment can be made by Fedex, DHL, UPS, *** express etc.
For shipments with a gross weight of ≤100KG, we provide prompt delivery services. For larger shipments of ≥100KG, we will discuss and determine the most efficient shipping method with you.
1. Are you a trading company or manufacturer?
Xinkang: We are a distinguished manufacturer with over a decade of specialized experience in this field.
2. How long is your delivery time?
XinKang: For items of regular size or samples, shipment can be arranged within 3-5 days. For batch quantities, the delivery time extends to 15 days.
3. Do you have a Minimum Order Quantity (MOQ)?
XinKang: No, we support sample orders without any MOQ.
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XinKang: We accept T/T in advance, PayPal, Western Union, and other convenient payment methods.
We look forward to your inquiries and are available to assist you at any time!
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